ZEISS Auriga CrossBeam


ZEISS Auriga CrossBeam


(TSS# 6509) This 2011 Auriga CrossBeam has been remanufactured to OEM functionality and can be used for TEM lamella prep, circuit edit front and back, defect/failure analysis, nanofabrication, nanoprototyping and MEMS. This Auriga is equipped with:

• Gemini Electron column, 0.1keV to 30keV, 4 pA – 20nA
• Canion ion Column, 5keV – 30keV, 1 pA – 50nA
• MonoGIS injection system
• 100 x 100mm 6 axis motorized eucentric stage
• In-lens detector, SE2 and EsB detector
• Dual CCD IR chamber scopes
• OS: Windows 7
• UI: SmartSEM, version 5.07
• Dual joystick
• Edwards XDS 10Dry pre-vacuum pump and Haskris R050 chiller

• Includes installation & operational training (North America)*
* Installation outside of North America will be quoted.
• 90 day warranty

Available Options Include:
• Gas chemistries
• Plasma cleaner
• On-site applications training

Included With Instrument

Training Basic Operational Training 90 Day Warranty 90 Day Warranty

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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