FEI Helios NanoLab 400


FEI Helios NanoLab 400


(TSS#6237) This 2015 Helios NanoLab 400 DualBeam is used for TEM lamella prep, circuit edit front and back, defect/failure analysis, nanofabrication and  nanoprototyping.

• Elstar FEG Electron column, 350v–30kV
• In-lens SE and BSE detector and STEM
• Elstar Electron column is capable of sub-nanometer STEM images
• Sidewinder Ion column: 30kV
• Milling Power: 21nA beam current
• CDEM with 5nm image resolution
• Windows OS and FEI UI; TSS networking computer to make IT happy
• Five-axis motorized compucentric stage with load lock
• Specimen Coverage: 100mm diameter
• Load Lock
• Chamber scope for real time observation
• Gas Injection System (GIS): Max 4 injectors 2 included, chemistry of choice
• Vacuum System, oil free consisting IGP x 3, air cooled Turbo and dry PVP

• Includes installation & operational training (North America)*
* Installation outside of North America will be quoted.
• 90 day warranty

Available Options Include:
• GIS chemistries
• STEM with Flip Stage
• Omniprobe extraction
• I-Beam upgrade: 65nA
• Infrared for backside editing
• Plasma Cleaner

Included With Instrument

90 Day Warranty 90 Day Warranty Training Basic Operational Training

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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