FEI Helios NanoLab 400


FEI Helios NanoLab 400


(TSS#6237) This Helios NanoLab 400 DualBeam can be used for TEM lamella prep, circuit edit, defect/failure analysis, nanofabrication & nanoprototyping and MEMS.

• Elstar Electron capable of Sub-nanometer SEM images:
– 350v-30kV
– In lens SE and BSE detectors
• Sidewinder Ion column 0.5-30kV:
– Voltage 30kV
– Beam Current 21nA
• Windows OS and FEI UI with TSS networking computer to make IT happy
– Pattern and Imaging alignment (PIA) software
• Five-axis piezo motorized compucentric stage with load lock
– XYZTR: 100 x100 x 25mm x (n x 360⁰) x T -10⁰ +60⁰, n x360⁰
– Specimen Coverage: 80mm diameter
• IR Chamber scope
• EDX: Optional
• Original Gas Injection System: Max 4 injectors, 1 Pt or W included
• Vacuum System, oil free: PVP, Turbo with 3 IGP x 3
• 6 month warranty, installation & operational training (North America)
* Installation outside of North America will be quoted.

Available Options Include:
• GIS chemistries, Pt, W(CO)6, Xef2, I-Dep2, H2O & others
• Plasma Cleaner
• Flip Stage for STEM imaging and lamella prep
• Omniprobe for lift out or probing
• 65 nm ion beam current upgrade

Included With Instrument

180 day warranty from TSS Microscopy 180 Day Warranty Training Basic Operational Training

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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