FEI Versa 3D


FEI Versa 3D


(TSS# 4984) This 2013 Versa 3D DualBeam is used for defect characterization, failure analysis, and TEM sample prep

• Schottky NG FEG electron column & Ga LMIS ion column
• e-beam deceleration
• Vacuum modes: High Vacuum, Low Vacuum, and ESEM
• Detectors:
– InColumn Detector (Secondary Electrons (SE)
– Everhart-Thornley SE detector (ETD)
– Concentric Backscattered Electron (BSE) detector
– Low Vacuum SE detector
– Gaseous SE detector
• Plasma cleaner for sample and chamber cleaning
• Cryo can for DualBeam
• Original Gas Injection Systems (GIS): Max 3, includes: Pt & Carbon deposition
• Integrated fast beam blanker
• AutoSlice and View (Automated sequential mill and view for 3D reconstruction)
• Maps (Navigation and photomontage)
• EasyLift NanoManipulator (collection of TEM lamella)
• 5-axis motorized eucentric tilt stage
– XYZ: 110 x110, T: 65mm x R: n x 360⁰
• IR Camera for viewing sample/column
• Chamber integrated Nav-Cam

6-month warranty, installation & operational training (North America)*
*Installation outside of North America will be quoted.

• GIS chemistries Pt, W(CO)6, C, Xef2, I-Dep2, H2O, SCM, IEE & others
• High-performance Ion Conversion and Electron (ICE) detector
• Electron Beam Induced Current detector (EBIC)
• Oxford X-MaxN Silicon Drift Energy Dispersive X-Ray (EDX) detector
• Oxford Electron Backscatter Diffraction (EBSD) detector
• Oxford EBS3 (Automated sequential mill and acquire EBSD maps and/or orientation maps)
• Oxford EDS3 (Automated sequential mill and acquire EDS data of chemical maps)
• Retractable STEM detector with Bright Field, Dark Field & High Angle Annular Dark Field
• Hot and Peltier (e.g. cold stage) Stages
• Auto Slice & View

Included With Instrument

180 day warranty from TSS Microscopy 180 Day Warranty Installation Available Installation Available Training Basic Operational Training

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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