FEI V600CE FIB

$600,000
Overview

FEI V600CE FIB

$600,000

(TSS #1477) Pre-Owned, Focused Ion Beam system ReManufactured to OEM functionality by TSS Microscopy. The FEI V600CE is designed for circuit edit applications to the 65nm node. Installation and 90 day warranty are included.

  • Sidewinder FIB column, 30kV, 20nA beam current
  • PIA (Patterning, Imaging and Acquisition system)
  • End point detection
  • OS: FEI v:3.7.1 with TSS networking computer to make IT happy
  • NanoChemix Gas Delivery System with 2 gases, customer choice.
  • Piezo 5 axis motorized stage with full 150mm wafer coverage
  • IR chamber camera
  • Oil Free vacuum system comprising of TMP, Dry PVP & IGP
  • ┬áS2 Compliance

Optional:

  • Flood gun for charge neutralization
  • XeF2- insulator & low kV etch
  • H2O, O2-Organics and copper etch
  • Cl2-Al and Si etch
  • TMCTS-Insulator dep
  • W(CO2)-Tungsten dep
  • Backside edit package
  • CAD navigation software
Maintenance and Servicing

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Standard Services

90 Day Warranty 90 Day Warranty Installation Available Installation Available

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts

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Technical Fact Sheet

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