FEI Strata 400-STEM


FEI Strata 400-STEM


(TSS#4411) This 2004 Strata 400-STEM DualBeam is used for defect characterization, failure analysis, and TEM sample preparation
• Sirion Schottky electron column
– kV: 350v-30kV
– In lens SE and BSE detector
– Water cooled
• Sidewinder Ion column
– Ga LMIS, 2-30kV
• Windows XP OS and FEI UI with TSS networking computer to make IT happy
• Five-axis motorized tilt eucentric stage
– XYZTR: 100 x 100 x 20 mm, T: – 10° to + 60°, R: n x 360°
– 150mm wafer load lock
• Chamber scope for real time observation
• Gas Injection System (GIS): Max 4 injectors, includes 1 GIS (Pt or W)
• Vacuum System, oil free PVP, air cooled TMP & IGP x3

6-month warranty, installation & operational training (North America) *
* Installation outside of North America will be quoted.

• GIS chemistries Pt, W(CO)6, Xef2, I-Dep2, H2O & others
• Infrared camera for backside editing
• Plasma Cleaner
• Auto FIB
• Auto TEM
• Auto Slice & View
• FEI Navigator

Included With Instrument

180 day warranty from TSS Microscopy 180 Day Warranty Training Basic Operational Training Installation Available Installation Available

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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