FEI Strata 400S


FEI Strata 400S


(TSS#4411) This 2004 Strata 400S DualBeam can be used for TEM lamella prep, circuit edit front & back, defect/failure analysis, nanofabrication, nanoprototyping and MEMS. Includes installation, basic operational training and 90-day warranty

• Electron column with Schottky FEG, 350v-30kV
• In lens SE and BSE detector
• Magnum ion column, 5–30kV
• Ga 69/71 LMIS
• Milling Power: 22nA beam current and 100 A/cm²
• CDEM with 7nm image resolution
• Windows OS and FEI UI; TSS networking computer to make IT happy
• Five-axis motorized compucentric stage with 150mm load lock
• XYZ: 100 x 100x 10 mm, piezo driven
• T: – 10° to + 60°, Rotation:  n x 360°
• Flip stage with Omniprobe lift out
• Chamber scope for real time observation
• Gas Injection System (GIS): Max 4 injectors 2 included, chemistry of choice
• Vacuum System, oil free air-cooled turbo, IGP x 3, & dry PVP

Additional Options Include:
• GIS chemistries
• Infrared for backside editing
• Plasma Cleaner

Maintenance and Servicing

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Standard Services

installation by tss microscopy included Installation Included 90 Day Warranty 90 Day Warranty Training Basic Operational Training

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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Detailed Product Information

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