(TSS# 4498) This 2004 Strata 400 DualBeam is used for defect characterization and failure analysis.
• Sirion Schottky electron column
– kV: 350v-30kV
– In lens SE and BSE detector
– Water cooled
•  Sidewinder Ion column
– Ga LMIS, 2-30kV
– CDEM
• Windows XP OS and FEI UI with TSS networking computer to make IT happy
• Five-axis motorized tilt eucentric stage
– XYZTR: 100 x 100 x 20 mm, T: – 10° to + 60°, R: n x 360°
– 150mm wafer load lock
• Chamber scope for real time observation
• Gas Injection System (GIS): Max 4 injectors, includes 1 GIS (Pt or W)
• Vacuum System, oil free PVP, air cooled TMP & IGP x3

6 month warranty, installation & operational training (North America) *
 *Installation outside of North America will be quoted.

Options
• GIS chemistries Pt, W(CO)6, Xef2, I-Dep2, H2O & others
•  Infrared camera for backside editing
• EDX, EBSD
• Omniprobe
• Plasma Cleaner
• Auto FIB
• Auto TEM
• Auto Slice & View
• FEI Navigator