(TSS#2111) This 2002 Strata 235 DualBeam can be used for TEM lamella prep, circuit edit front & back, defect/failure analysis, nanofabrication, nanoprototyping and MEMS. Includes installation, operational training and 90-day warranty

• FEG Electron column with Schottky FEG, 350v–30kV
• In lens SE and BSE detector
• Magnum ion column with Ga 69/71 LMIS, 5–30kV
• Milling Power: 22nA beam current
• CDEM with 7nm image resolution
• Windows OS and FEI UI; TSS networking computer to make IT happy
• Five-axis motorized compucentric stage
• XYZ: 50 x 50x 10 mm
• Tilt: – 10° to + 60°, Rotation: n x 360°
• Sample load: front door or load lock
• Chamber scope for real time observation
• Gas Injection System (GIS): Max 4 injectors 2 included, chemistry of choice
• Vacuum System, oil free IGP x 3, air cooled Turbo and dry PVP

Additional Options Include:
• GIS chemistries
• EDX
• Infrared for backside editing
• Omniprobe extraction
• Plasma Cleaner