FEI Scios LoVac


FEI Scios LoVac


(TSS# 6724) This 2018 FEI Scios™ LoVac is an ultra-high-resolution analytical DualBeam™ system that delivers outstanding 2D and 3D performance.

• NICol UHR Non-Immersion Schottky FESEM Column
– 350 eV – 30 keV, e-beam deceleration – 20v landing energy
• Sidewinder high-current gallium Ion Column
– 500 V – 30 kV
• Computer Control: OS: Windows 7 xT, & UI: FEI I xT
• 5-axes motorized eucentric tilt stage
–  XYZ: 110 x110 x 65mm, T: -15 / +90, R: n x 360⁰
• Vacuum: LoVac, oil free, PVP, TMP & IGP x 3
• Detectors:
– InColumn Detector (Secondary Electrons (SE)
– Everhart-Thornley SE detector (ETD)
– Concentric Backscattered Electron (BSE) detector
– Low Vacuum SE detector
– Gaseous SE detector
• Plasma cleaner for sample and chamber cleaning
• Cryo can for DualBeam
• Original Gas Injection Systems (GIS): Max 3, includes: Pt & Carbon deposition
• Integrated fast beam blanker
• AutoSlice and View (Automated sequential mill and view for 3D reconstruction)
• Maps (Navigation and photomontage)
• EasyLift NanoManipulator (collection of TEM lamella)
• CCD IR Camera
• Chamber integrated Nav-Cam

6-month warranty, installation & operational training (North America) *
* Installation outside of North America will be quoted.

• GIS chemistries Pt, W(CO)6, C, Xef2, I-Dep2, H2O, SCM, IEE & others
• High-performance Ion Conversion and Electron (ICE) detector
• Electron beam Induce Current detector (EBIC)
• Oxford X-MaxN Silicon Drift Energy Dispersive X-Ray (EDX) detector
• Oxford Electron Backscatter Diffraction (EBSD) detector
• Oxford EBS3 (Automated sequential mill and acquire EBSD maps and/or orientation maps)
• Oxford EDS3 (Automated sequential mill and acquire EDS data of chemical maps)
• Retractable STEM detector with Bright Field, Dark Field & High Angle Annular Dark Field
• Hot and cold (Peltier) stage
• Stages Auto Slice & View

Included With Instrument

180 day warranty from TSS Microscopy 180 Day Warranty Installation Available Installation Available Training Basic Operational Training

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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