(TSS# 6724) This 2018 FEI Scios™ LoVac is an ultra-high-resolution analytical DualBeam™ system that delivers outstanding 2D and 3D performance.

• NICol UHR Non-Immersion Schottky FESEM Column
– 350 eV – 30 keV, e-beam deceleration – 20v landing energy
• Sidewinder high-current gallium Ion Column
– 500 V – 30 kV
• Computer Control: OS: Windows 7 xT, & UI: FEI I xT
• 5-axes motorized eucentric tilt stage
–  XYZ: 110 x110 x 65mm, T: -15 / +90, R: n x 360⁰
• Vacuum: LoVac, oil free, PVP, TMP & IGP x 3
• Detectors:
– InColumn Detector (Secondary Electrons (SE)
– Everhart-Thornley SE detector (ETD)
– Concentric Backscattered Electron (BSE) detector
– Low Vacuum SE detector
– Gaseous SE detector
• Plasma cleaner for sample and chamber cleaning
• Cryo can for DualBeam
• Original Gas Injection Systems (GIS): Max 3, includes: Pt & Carbon deposition
• Integrated fast beam blanker
• AutoSlice and View (Automated sequential mill and view for 3D reconstruction)
• Maps (Navigation and photomontage)
• EasyLift NanoManipulator (collection of TEM lamella)
• CCD IR Camera
• Chamber integrated Nav-Cam

6-month warranty, installation & operational training (North America) *
* Installation outside of North America will be quoted.

Options
• GIS chemistries Pt, W(CO)6, C, Xef2, I-Dep2, H2O, SCM, IEE & others
• High-performance Ion Conversion and Electron (ICE) detector
• Electron beam Induce Current detector (EBIC)
• Oxford X-MaxN Silicon Drift Energy Dispersive X-Ray (EDX) detector
• Oxford Electron Backscatter Diffraction (EBSD) detector
• Oxford EBS3 (Automated sequential mill and acquire EBSD maps and/or orientation maps)
• Oxford EDS3 (Automated sequential mill and acquire EDS data of chemical maps)
• Retractable STEM detector with Bright Field, Dark Field & High Angle Annular Dark Field
• Hot and cold (Peltier) stage
• Stages Auto Slice & View