FEI Magellan SEM


FEI Magellan SEM


(TSS#6080) The Magellan XHR (eXtreme High Resolution) scanning electron microscope is capable of 0.9nm SEM resolution and 0.8nm STEM resolution. Includes installation, operational training and 90-day warranty.

This FEI Magellan includes:
• Elstar XHR electron column, 300v–30kV, Schottky FEG
• In lens SE and BSE detector
• Everhart-Thornley SE detector (ETD)
• vCD backscatter detector, solid state retractable
• Win xP OS and FEI xT UI; TSS networking computer to make IT happy
• Five-axis motorized piezo driven compucentric stage
• Full coverage for 100mm samples
• 100mm load lock
• Chamber scope for real time observation
• Vacuum System: oil free, column IGP x 2, air cooled Turbo and dry PVP

Available Options Include:
• Gas Injection System: Metal deposition (Tungsten, Platinum)
• Plasma Cleaner

Maintenance and Servicing

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Standard Services

90 Day Warranty 90 Day Warranty Installation Available Installation Available Training Training Available

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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Detailed Product Information

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