(TSS#6080) This 2009 Magellan XHR (eXtreme High Resolution) scanning electron microscope is capable of sub-nm SEM and STEM resolution.

This FEI Magellan includes:
• Elstar XHR electron column, 300v–30kV, Schottky FEG
• In lens SE and BSE detector
• Everhart-Thornley SE detector (ETD)
• vCD backscatter detector, solid state retractable
• Win xP OS and FEI xT UI; TSS networking computer to make IT happy
• Five-axis motorized piezo driven compucentric stage
• XYZ: 100 x 100 x 20 mm
• Tilt: -10° to +60°, Rot: 720° stroke
• 100mm load lock
• Chamber scope for real time observation
• Vacuum System: oil free, consisting of column IGP x 2, air cooled Turbo and dry PVP
• Includes installation, operational training and 90-day warranty.

Available Options Include:
• Plasma Cleaner
• EDX
• Gas Injection System (GIS): Metal deposition (Tungsten, Platinum)