FEI Helios NanoLab 600 S


FEI Helios NanoLab 600 S


(TSS#6239) This pre-owned Helios NanoLab 600S DualBeam can be used for TEM lamella prep, circuit edit front & back, defect/failure analysis, nanofabrication, nanoprototyping and MEMS. The S stands for STEM (Scanning TEM) imaging which can take the load off your TEM. It has been ReManufactured to original OEM specification and includes:

• Elstar electron column is capable of sub-nm SEM and STEM imaging
• Electron beam voltage from 350v–30kV
• In-lens SE and BSE and STEM detectors
• Sidewinder Ion column: 0.5–30kV with 21nA beam current
• Windows OS and FEI UI; TSS networking computer to make IT happy
• Pattern and Imaging alignment (PIA) software
• Five-axis motorized compucentric stage
• Specimen Coverage: 80mm diameter
• Chamber scope for real time observation
• Gas Injection System: Max 4 injectors 2 included, chemistry of choice
• Vacuum System, oil free consisting IGP x 3, air cooled Turbo and dry PVP
• Includes installation, operational training, 90 day warranty

Available Options Include:

Omniprobe lift out system
GIS chemistries
• I-Beam upgrade: 65nA
• Infrared for backside editing
• Plasma Cleaner

Maintenance and Servicing

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Standard Services

installation by tss microscopy included Installation Included 90 Day Warranty 90 Day Warranty Training Basic Operational Training

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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Detailed Product Information

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