FEI Helios NanoLab 400 STEM


FEI Helios NanoLab 400 STEM


(TSS#6238) This 2015 Helios NanoLab 400S DualBeam is used for TEM lamella prep, circuit edit front & back, defect/failure analysis, nanofabrication and nanoprototyping.

• Elstar Electron column, capable of sub-nm SEM and STEM images
• Electron beam voltage: 350v–30kV
• In lens SE and BSE detector and STEM
• Sidewinder Ion column: 0.5–30kV with 21nA beam current
• CDEM with 5nm image resolution
• Windows OS and FEI UI; TSS networking computer to make IT happy
• Pattern and Imaging Alignment (PIA) software
• Five-axis motorized compucentric stage with load lock
• Specimen Coverage: 80mm diameter
• Flip Stage with Omniprobe lift out for STEM imaging
• Chamber scope for real time observation
• Gas Injection System (GIS): Max 4 injectors 2 included, chemistry of choice
• Vacuum System, oil free consisting of IGP x 3, air cooled Turbo and dry PVP
• Includes installation, operational training, 90-day warranty

Available Options Include:
• GIS chemistries
• I-Beam upgrade: 65nA
• Infrared for backside editing
• Plasma Cleaner

Maintenance and Servicing

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Standard Services

installation by tss microscopy included Installation Included 90 Day Warranty 90 Day Warranty Training Basic Operational Training

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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Detailed Product Information

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