(TSS#6106) This Helios NanoLab 1200 DualBeam can be used for TEM lamella prep, circuit edit front & back, defect/failure analysis, nanofabrication & nanoprototyping and MEMS. This Helios NL 1200 includes:

• Elstar Electron column
  • Voltage 350v-30kV
  •  In lens SE and BSE and STEM detectors
  • SEM is capable of 0.9nm resolution
  • STEM is capable of 0.9nm resolution
• Tomahawk Ion column
  • Voltage 0.5-30kV
  • CDEM
  • Beam Current, 65nA
• Win OS & FEI UI with TSS networking computer to make IT happy
• Pattern and Imaging alignment (PIA) software
• 5 axis motorized (X, Y, Z, R, Tilt), 300 mm piezo driven motion
  • 300/200 mm semiconductor wafers, 100/200 mm data storage wafers or wafer pieces
  • Small parts holder accommodates TEM samples & wafer pieces up to 50 mm²
  • Chamber scope for real time observation
• Gas Injection System: 1  injector included, chemistry of choice (Maximum 4 injectors)
• Vacuum System, oil free: dry PVP, air cooled TMP & 3 IGP

6-month warranty, installation & operational training (North America) *
* Installation outside of North America will be quoted

Options:

• GIS chemistries, W(CO)6, Xef2, I, I-Dep2, H2O, Cl2, TOMCATS
• EDX
• STEM
• Plasma Cleaner
• Omniprobe for lift out
• Omniprobe for probing