FEI Helios NL 1200

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FEI Helios NL 1200

Call for Quotation

(TSS#6106) This Helios NanoLab 1200 DualBeam can be used for TEM lamella prep, circuit edit front & back, defect/failure analysis, nanofabrication & nanoprototyping and MEMS. This Helios NL 1200 includes:

  • Elstar Electron column
    • Voltage 350v-30kV
    •  In lens SE and BSE and STEM detectors
    • SEM is capable of 0.9nm resolution
    • STEM is capable of 0.9nm resolution
  • Tomahawk Ion column
    • Voltage 0.5-30kV
    • CDEM
    • Beam Current, 65nA
  • Win OS & FEI UI with TSS networking computer to make IT happy
  • Pattern and Imaging alignment (PIA) software
  • 5 axis motorized (X, Y, Z, R, Tilt), 300 mm piezo driven motion
    • 300/200 mm semiconductor wafers, 100/200 mm data storage wafers or wafer pieces
    • Small parts holder accommodates TEM samples & wafer pieces up to 50 mm²
    • Chamber scope for real time observation
  • Gas Injection System: 1  injector included, chemistry of choice (Maximum 4 injectors)
  • Vacuum System, oil free: dry PVP, air cooled TMP & 3 IGP

6-month warranty, installation & operational training (North America) *
* Installation outside of North America will be quoted


  • GIS chemistries, W(CO)6, Xef2, I, I-Dep2, H2O, Cl2, TOMCATS
  • EDX
  • STEM
  • Plasma Cleaner
  • Omniprobe for lift out
  • Omniprobe for probing

Included With Instrument

180 day warranty from TSS Microscopy 180 Day Warranty Training Basic Operational Training installation by tss microscopy included Installation Included

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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