FEI FIB V600CE

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Overview

FEI FIB V600CE

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(TSS#1477) This 2012 FIB V600 CE with Sidewinder ion column is designed for circuit edit and includes the NanoChemix gas system.

This FEI FIB V600CE-S includes:
• Sidewinder column 500-30kV
• Milling Power: 20nA beam current and 100 A/cm2 current density
• End Point Detection
• CDEM for ions and electron images with 7nm resolution
• Windows XP OS and FEI xT with TSS networking computer to make IT happy
• PIA (Patterning, Imaging and Acquisition system)
• 5-axis Piezo driven motorized eucentric tilt stage
– Full coverage of 150mm DIA sample
– XYZRT: 150 x 150 x 25mm x n x 360° x -10°+60°
• Chamber scope for real time observation
• Infrared Camera (IR) for backside edit
NanoChemix Gas Delivery System, tri-nozzle design with dual opposing needle configuration for high concentration gas delivery deep into sub-micron vias. Configured for 5 different gases. 2 gases customer choice included.
• Vacuum System oil free PVP, TMP, IGP

• 6 month warranty, installation & operational training (North America)*
* Installation outside of North America will be quoted.

Available Options Include:
• GIS chemistries
• Plasma Cleaner
• Omniprobe for probing
• Omniprobe for lift out

Included With Instrument

Training Basic Operational Training 180 day warranty from TSS Microscopy 180 Day Warranty

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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Detailed Product Information

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