The FEI FIB V600 CE-S 600 designates 150mm diameter sample coverage. S designates Sidewinder ion column. “Original” GIS system is included. This FIB is designed for circuit edit when the sample height interferes with the NanoChemix hardware under the pole piece. Includes installation, operational training and 90 day warranty.

• Sidewinder column 500–30kV
• Milling Power: 20nA beam current
• CDEM for ions and electron images with 7nm resolution
• Win XP OS and FEI xT; TSS networking computer to make IT happy
• PIA (Patterning, Imaging and Acquisition system)
• 5-axis Piezo driven motorized eucentric tilt stage
• XYZRT: 150 x 150 x 25mm, x n x 360°, x -10°+60°
• Full coverage of 150mm diameter sample
• Chamber scope for real time observation
• Infrared Camera (IR) for real time observation
• Gas Injection System: Max 4 injectors; 2 included, chemistry of choice
• Vacuum System oil free consisting of IGP, air cooled Turbo and dry PVP

Available Options Include:
• GIS chemistries
• 65nA upgrade
• Plasma Cleaner
• Omniprobe for probing
• Omniprobe for lift out