Need Information On Maintenance or Servicing?
(TSS#1477) This 2012 FIB V600 CE with Sidewinder ion column is designed for circuit edit and includes the NanoChemix gas system.
This FEI FIB V600CE-S includes:
• Sidewinder column 500-30kV
• Milling Power: 20nA beam current and 100 A/cm2 current density
• End Point Detection
• CDEM for ions and electron images with 7nm resolution
• Windows XP OS and FEI xT with TSS networking computer to make IT happy
• PIA (Patterning, Imaging and Acquisition system)
• 5-axis Piezo driven motorized eucentric tilt stage
– Full coverage of 150mm DIA sample
– XYZRT: 150 x 150 x 25mm x n x 360° x -10°+60°
• Chamber scope for real time observation
• Infrared Camera (IR) for backside edit
• NanoChemix Gas Delivery System, tri-nozzle design with dual opposing needle configuration for high concentration gas delivery deep into sub-micron vias. Configured for 5 different gases. 2 gases customer choice included.
• Vacuum System oil free PVP, TMP, IGP
• 6 month warranty, installation & operational training (North America)*
* Installation outside of North America will be quoted.
Available Options Include:
• GIS chemistries
• Plasma Cleaner
• Omniprobe for probing
• Omniprobe for lift out