FEI V600 CE (NC-S)

$600,000
Overview

FEI V600 CE (NC-S)

$600,000

(TSS#1477) This 2012 FIB V600 CE (NC-S) features the Sidewinder ion column and with the NanoChemix gas system. Designed for circuit edit.  Includes installation, operational training and 90-day warranty.

This FEI FIB V600CE includes:

  • Sidewinder column 500–30kV
  • Milling Power: 20nA beam current
  • End Point Detection
  • CDEM for ions and electron images with 7nm resolution
  • Win XP OS and FEI xT; TSS networking computer to make IT happy
  • PIA (Patterning, Imaging and Acquisition system)
  • 5-axis Piezo driven motorized eucentric tilt stageFull coverage of 150mm diameter sample
  • XYZRT: 150 x 150 x 25mm x n x 360° x -10°+60°
  • Chamber scope for real time observation
  • Infrared Camera (IR) for backside edit
  • NanoChemix Gas Delivery System: tri-nozzle design with dual opposing needle configuration for high concentration gas delivery deep into sub-micron vias. Configured for 5 different gases; 2 gases of customer choice included.
  • Vacuum System oil free consisting of IGP, air cooled Turbo and dry PVP

Available Options Include:
• GIS chemistries
• 65nA beam current upgrade
• Plasma Cleaner
• Omniprobe for probing
• Omniprobe for lift out

Maintenance and Servicing

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Standard Services

installation by tss microscopy included Installation Included 90 Day Warranty 90 Day Warranty Training Basic Operational Training

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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Detailed Product Information

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