The FIB 800-M uses Magnum ion column. This FIB is used for circuit edit (front and back side), defect and failure analysis, TEM lamella prep, nanofabrication, nanoprototyping and MEMS.

This FEI FIB 800-M includes:
• Magnum ion column, 5–30kV
• Milling Power: 21nA beam current
• CDEM for ions and electron images with 7nm image resolution
• Windows OS and FEI UI; TSS networking computer to make IT happy
• 5-axis motorized eucentric tilt stage
• Full coverage of 200mm diameter sample
• XYZRT: 200 x 200 x 25mm x n x 360° x -15° +60°
• 200mm load lock
• Chamber scope for real time observation
• Gas Injection System: Max 4 injectors; 2 included, chemistry of choice
• Vacuum System: column IGP, air cooled Turbo and mechanical PVP

• Includes installation & operational training (North America)*
* Installation outside of North America will be quoted.
• 90 day warranty

Available Options Include:
• GIS chemistries
• Plasma Cleaner
• Infrared for backside editing
• Omniprobe for lift out
• Omniprobe for probing
• Dry pump to replace mechanical oil PVP

Included With Instrument

90 Day Warranty 90 Day Warranty Training Basic Operational Training

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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