FEI FIB 200-S

$200,000
Overview

FEI FIB 200-S

$200,000

(TSS#6176) The FEI FIB 200-S uses the Sidewinder ion column. This FIB is used for circuit edit (front and back side), defect and failure analysis, TEM lamella prep, nanofabrication and nanoprototyping and MEMS. Includes installation, operational training and 90-day warranty

This FEI FIB200-S includes:
• Sidewinder column 500V – 30kV; excellent beam profile and stability
• Milling Power: 20nA beam current and 100 A/cm² current density
• CDEM for ions and electron images with 7nm image resolution
• Windows OS and FEI UI; TSS networking computer to make IT happy
• 5-axis, comp-eucentric tilt stage
• Full coverage of 80mm diameter or 55mm square with full rotation
• Front door load
• Chamber scope for real time observation
• Gas Injection System: Max 4 injectors; 2 included, chemistry of choice
• Vacuum System: column IGP, air cooled Turbo and mechanical PVP

Available Options Include:
• GIS chemistries
• Plasma Cleaner
• Upgrade to 65nA beam current
• Infrared camera for backside editing
• Omniprobe for lift out
• Omniprobe for probing
• Dry pump to replace mechanical oil PVP

Maintenance and Servicing

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Standard Services

installation by tss microscopy included Installation Included 90 Day Warranty 90 Day Warranty Training Training Available

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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Detailed Product Information

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