(TSS#6176) The FEI FIB 200-P uses the pre-lens ion column. This FIB is used for circuit edit (front and back side), defect and failure analysis, TEM lamella prep, nanofabrication, nanoprototyping and MEMS. Includes installation, operational training and 90-day warranty.

This FEI FIB200-P includes:
• Pre-lens column 5-30kV, with excellent beam profile and stability
• Milling Power: 11nA beam current and 50 A/cm² current density
• CDEM for ions and electron images with 5nm image resolution
• Windows OS and FEI UI; TSS networking computer to make IT happy
• 5-axis, comp-eucentric tilt stage
• Full coverage of 80mm diameter or 55mm square with full rotation
• Front door load
• Chamber scope for real time observation
• Gas Injection System: Max 4 injectors; 2 included, chemistry of choice
• Vacuum System: column IGP, air cooled Turbo and mechanical PVP

Available Options Include:
• GIS chemistries
• Plasma Cleaner
• Infrared camera for backside editing
• Omniprobe for lift out
• Omniprobe for probing
• Dry pump to replace mechanical oil PVP