(TSS#1690) The FEI FIB 200-M uses the Magnum ion column. The Magnum doubles the milling power from earlier pre-lens FIB columns. This FIB is used for circuit edit (front and back side), defect and failure analysis, TEM lamella prep, nanofabrication, nanoprototyping and MEMS.

This FEI FIB 200-M includes:
• Magnum column: 5-30kV
• Milling power: 21nA beam current
• CDEM for ions and electron images with 7nm resolution
• Windows OS and FEI UI; TSS networking computer to make IT happy
• 5-axis, comp-eucentric tilt stage
• Full coverage of 70mm diameter
• Motorized XYZ: 25 x 25 x 25mm x Rotation x 360° x Manual T -15° +60
• Front door load
• Chamber scope for real time observation
• Gas Injection System: Max 4 injectors, 2 included; chemistry of choice
• Vacuum system: column IGP, air cooled turbo and mechanical PVP

• Includes installation & operational training (North America)*
* Installation outside of North America will be quoted.
• 90 day warranty

Available Options Include:
• GIS chemistries
• Plasma Cleaner
• Infrared camera for backside editing
• Omniprobe for lift out
• Omniprobe for probing
Dry pump to replace mechanical oil PVP

Included With Instrument

90 Day Warranty 90 Day Warranty Training Basic Operational Training

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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