(TSS#5312) This 2005 Expida 1265 DualBeam with 300mm dual FOUPs is used for manufacturing process control. Includes installation, operational training and 90-day warranty

• Schottky FEG with through-the-lens detection
• Electron beam: 5 nm, 1–30 kV beam voltage
• Magnum Ion FIB Ga 69/71 with below lens CDEM
• Ion beam: 7 nm, 5–30 kV
• Windows OS and FEI UI; TSS networking computer to make IT happy
• Five-axis motorized compucentric stage
• XYZ: 305 x 305 x 12 mm
• Tilt: – 5° to + 60°, Rotation: n x 360°
• Dual 300mm FOUPs
• Chamber scope for real time observation
• Gas Injection System (GIS): Max 4 injectors 2 included, chemistry of choice
• Vacuum System, oil free column IGP x 3, air cooled Turbo and dry PVP

Additional Options Include:
• GIS chemistries
• Plasma Cleaner
• EDX