FEI Expida 1265

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Overview

FEI Expida 1265

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(TSS#5312) This 2005 Expida 1265 DualBeam with 300mm dual FOUPs is used for manufacturing process control. Includes installation, operational training and 90-day warranty

• Schottky FEG with through-the-lens detection
• Electron beam: 5 nm, 1–30 kV beam voltage
• Magnum Ion FIB Ga 69/71 with below lens CDEM
• Ion beam: 7 nm, 5–30 kV
• Windows OS and FEI UI; TSS networking computer to make IT happy
• Five-axis motorized compucentric stage
• XYZ: 305 x 305 x 12 mm
• Tilt: – 5° to + 60°, Rotation: n x 360°
• Dual 300mm FOUPs
• Chamber scope for real time observation
• Gas Injection System (GIS): Max 4 injectors 2 included, chemistry of choice
• Vacuum System, oil free column IGP x 3, air cooled Turbo and dry PVP

Additional Options Include:
• GIS chemistries
• Plasma Cleaner
• EDX

 

Maintenance and Servicing

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Standard Services

90 Day Warranty 90 Day Warranty installation by tss microscopy included Installation Included Training Basic Operational Training

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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Detailed Product Information

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