FEI Expida 1255


FEI Expida 1255


(TSS#4542) This 2005 Expida 1255 DualBeam includes  installation, basic operational training and 90-day warranty.

• FEG Electron column: Schottky FEG with through-the-lens detection
• E-beam: 5 nm, 1–30 kV
• Magnum ion column, Ga 69/71 LMIS, with CDEM below lens detection
• I-beam: 7 nm, 5–30 kV
• Windows OS and FEI UI; TSS networking computer to make IT happy
• Five-axis motorized compucentric stage
• XYZ: 305 x 305 x 12 mm
• Tilt: – 5° to + 60°, Rotation:  n x 360°
• Single wafer load drawer for 300mm, 200mm wafers or pieces
• Chamber scope for real time observation
• Gas Injection System (GIS): Max 4 injectors 2 included, chemistry of choice
• Vacuum System, oil free with air cooled Turbo, IGP x 3 & dry PVP

Additional Options Include:
• GIS chemistries
• Plasma Cleaner
• Omniprobe for lamella extraction

Maintenance and Servicing

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Standard Services

installation by tss microscopy included Installation Included 90 Day Warranty 90 Day Warranty Training Basic Operational Training

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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Detailed Product Information

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