(TSS#4542) This 2005 Expida 1255 DualBeam includes  installation, basic operational training and 90-day warranty.

• FEG Electron column: Schottky FEG with through-the-lens detection
• E-beam: 5 nm, 1–30 kV
• Magnum ion column, Ga 69/71 LMIS, with CDEM below lens detection
• I-beam: 7 nm, 5–30 kV
• Windows OS and FEI UI; TSS networking computer to make IT happy
• Five-axis motorized compucentric stage
• XYZ: 305 x 305 x 12 mm
• Tilt: – 5° to + 60°, Rotation:  n x 360°
• Single wafer load drawer for 300mm, 200mm wafers or pieces
• Chamber scope for real time observation
• Gas Injection System (GIS): Max 4 injectors 2 included, chemistry of choice
• Vacuum System, oil free with air cooled Turbo, IGP x 3 & dry PVP

Additional Options Include:
• GIS chemistries
• Plasma Cleaner
• Omniprobe for lamella extraction
• EDX