Call for Quotation


Call for Quotation

(TSS#4754) This 2005 Defect Analyzer (DA) 300 DualBeam is for in-fab defect analysis. Includes installation, operational training and 90-day warranty.

• Electron source Schottky FEG, 200v–30kV
• In lens SE and BSE detector
• Ion source Ga 69/71 LMIS, 5–30kV
• Magnum Ion column: 21nA beam current
• Windows OS and FEI UI; TSS networking computer to make IT happy
• Five-axis motorized comp-eucentric stage
• XYZ: 305 x 305 x 10 mm
• Tilt: – 10° to + 60°, Rotation: n x 360°
• Dual 300mm FOUPs
• Chamber scope for real time observation
• Gas Injection System (GIS): Max 4 injectors 2 included, chemistry of choice
• Vacuum System, oil free consisting of Column IGP x 3, air cooled Turbo and dry PVP

• Includes installation & operational training (North America)*
* Installation outside of North America will be quoted.
• 90 day warranty

Additional Options Including:
• GIS chemistries
• Infrared camera for backside editing
• Plasma Cleaner

Included With Instrument

90 Day Warranty 90 Day Warranty Training Basic Operational Training

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

Inquire for More Information

Detailed Product Information

Enter your contact information below to request more information about this instrument.
  • This field is for validation purposes and should be left unchanged.
TSS Microscopy is committed to minimizing transmission of COVID-19 and we are adjusting our operations accordingly.Learn more here