FEI DA300 Dual Beam


FEI DA300 Dual Beam


(TSS#4754) This 2005 Defect Analyzer (DA) 300 DualBeam is for in-fab defect analysis. Includes installation, operational training and 90-day warranty.

• Electron source Schottky FEG, 200v–30kV
• In lens SE and BSE detector
• Ion source Ga 69/71 LMIS, 5–30kV
• Magnum Ion column: 22nA beam current
• CDEM with 7nm image resolution
• Windows OS and FEI UI; TSS networking computer to make IT happy
• Five-axis motorized comp-eucentric stage
• XYZ: 305 x 305 x 10 mm
• Tilt: – 10° to + 60°, Rotation: n x 360°
• Dual 300mm FOUPs
• Chamber scope for real time observation
• Gas Injection System (GIS): Max 4 injectors 2 included, chemistry of choice
• Vacuum System, oil free consisting of Column IGP x 3, air cooled Turbo and dry PVP

Additional Options Including:
• GIS chemistries
• Infrared camera for backside editing
• Plasma Cleaner

Maintenance and Servicing

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Standard Services

installation by tss microscopy included Installation Included 90 Day Warranty 90 Day Warranty Training Basic Operational Training

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service

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Detailed Product Information

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